SPECIFICATION
Project title: Fabrication Design of MOS Device
Preliminary Knowledge
1. Principle Fabrication Process of nMOS Transistor
2. IV Curve for MOS operation & Cirruits.
3. Operation of MOS devices & Circiuits
4. Basic Semiconductor Equation
5. Related Knowledge
What to be done?
You will use the ATHENA & ATLAS tools to simulate the fabrication process of NMOS transistor and characterize its electrical properties. Both the p- and n- type MOS will be fabricated and its IV curve will be generated and verified accordingly. Understanding on the process to fabricate the device and the basic understanding on its electrical properties is essential before proceed to the lab.
Software/Tools Required:
ATHENA-Process Simulation
ATLAS- Device Simulation