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what is λ(lemda) based tool??

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λ is the feature size on a wafer. All other dimensions are relative to that one number. It is a characteristic of the semiconductor manufacturing process. What does this all mean? It means that all the dimensions on a mask layout are specified in units of λ, the basic feature size. In the very last step λ is assigned an actal value and the mask production commences.

Missed a class or two did we?
 
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